We have succeeded in generation of silicon nanofibers, nanoparticles and porous films by laser irradiation on waste silicon sludge disposed from the semiconductor industry. These nanomaterials are used for producing high-performance lithium-ion batteries and functional coatings. We also develop new technologies for nanoscale periodical surface structures on various materials to control their water repellency, hydrophilicity, and mold releasing ability, and so on.